Best Reported Ohmic Contact Resistance

Revised February 2, 1997

Figure 1. Contact resistance of nickel ohmic contacts to n-type 6H silicon carbide as a function of doping.

Figure 2. Contact resistance of aluminum/titanium and cobalt silicide ohmic contacts to p-type 6H silicon carbide as a function of doping.

Do you know of better contact resistances for SiC? If so, please send e-mail to

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